Unmasking the Resolution–Throughput Tradespace of Focused‐Ion‐Beam Machining (Adv. Funct. Mater. 38/2022)

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چکیده

Focused-Ion-Beam Machining Sacrificial masking films enable focused-ion-beam machining of complex nanostructures beyond the resolution limit ion beam, but current understanding this super-resolution effect is both empirical and spatial. In article number 2111840, Samuel M. Stavis co-workers introduce chromia as a multifuntional material develop new theory that elucidates resolution–throughput tradespace, revealing dominant advantage temporal.

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ژورنال

عنوان ژورنال: Advanced Functional Materials

سال: 2022

ISSN: ['1616-301X', '1616-3028']

DOI: https://doi.org/10.1002/adfm.202270214